- Exceeding the established target for OSHA recordable incident rate (0.96 vs. <0.5)
- Actual water consumption (15.47 million gallons) exceeded the goal (13 million gallons) due to weather conditions
- Finding qualified female candidates and URMs for technical roles
- Limited number of URMs in leadership positions
Axcelis Technologies, Inc.
Greenhouse gas emissions & sustainability report data
In its 2022 reporting, Axcelis Technologies, Inc. disclosed greenhouse gas emissions of 5.3K tCO2e (company-wide). By scope: Scope 1: 5.8 metric tonnes per $million in revenue (company-wide); Scope 2: 4.42 metric tonnes per $million in revenue (company-wide). Figures are as stated in the company's own report and may use different boundaries, units or methods (for example market-based vs location-based Scope 2), so compare with care.
GHG Emissions
5.3K tCO2e (company-wide)
2022
Renewable Energy
Approximately 15% (from ENGIE, but includes purchased RECs)
of total energy
Water Usage
58.552 thousand cubic meters (15,467,768.58 gallons)
2022
Waste
889.62 metric tonnes of solid waste (54.2% recycled)
2022
Energy Use
70.7K GJ
2022
📊 Emissions by Scope (2022)
| Scope | What it covers | Reported value |
|---|---|---|
| Scope 1 | Direct emissions from sources the company owns or controls (fuel combustion, company vehicles, process and fugitive emissions). | 5.8 metric tonnes per $million in revenue (company-wide) |
| Scope 2 | Indirect emissions from purchased electricity, steam, heat and cooling. | 4.42 metric tonnes per $million in revenue (company-wide) |
New to scopes? Read Scope 1, 2 and 3 emissions explained and market-based vs location-based Scope 2.
📈 Emissions by Report Period
| Report period | Headline emissions figure reported |
|---|---|
| 2022 | 5.3K tCO2e (company-wide) |
| 2021 | 3.4K metric tonnes CO2e (2021) |
| 2018 | 14.9K tons CO2e (Scope 1 2 and selected Scope 3) |
Each row is the headline figure extracted from a different report; scope coverage and methodology can change between years.
✅ Reported Environmental Achievements
- Reduced Beverly Headquarters’ purchased electricity by 1.2 million kWh
- Reduced Scope 1 emissions from 9,689.64 metric tonnes of CO2e in 2011 to 5,336.031 metric tonnes of CO2e in 2022 (45% reduction)
- Reduced Beverly Headquarters’ Scope 2 emissions by 54% from 2021
- Achieved goal of emitting less than 32 pounds of SF6 at the Beverly facility (27.6 pounds emitted)
- Reduced solid waste disposal to 0.50 tons/$M revenue (16% reduction from 2021)
- Reduced hazardous waste disposal to 15.87 pounds/$M revenue
- ISO 14001 certification for Axcelis Headquarters since 2000 (currently ISO 14001:2015)
- ISO 45001 certification for Axcelis Headquarters (April 2022) and AAOC (June 2022)
🎯 Climate & Sustainability Targets
🔭 Long-term
- Net Zero by 2050 (aligned with SBTi and Semiconductor Climate Consortium)
🌱 ESG Focus Areas
EnvironmentClimate ChangeSafetySocialPeopleCommunityGovernance